Thermoreflectance Imaging: What Is It?
Thermoreflectance thermal imaging is dependent on the measurement of the relative change in the sample’s surface reflectivity as a function of temperature. As the temperature of the sample changes, the refractive index, and therefore, the reflectivity also changes. The change in reflectivity is dependent on the Thermoreflectance Coefficient, a basic material property that is a function of the illumination wavelength, the sample material and material surface characteristics, and the ambient temperature.
With illumination wavelengths in the visible range, a lock-in technique to enhance signal to noise ratio, and advanced embedded algorithms for data analysis the Microsanj thermal imaging systems surpass traditional thermal imaging techniques achieving:
- Spatial resolution less than 300 nanometers
- Transient resolution less than 1 nanosecond
- Temperature resolution to 0.25 ⁰C
For further information see: AN-003, “Understanding the Thermoreflectance Coefficient: The Key to Achieving Optimal Temperature & Spatial Resolution for Thermal Imaging of Microelectronic Devices”
For a comparison to traditional imaging techniques see: AN-004 “Comparing Thermal Imaging Approaches” http://www.microsanj.com/application-notes/comparing-thermal-imaging-approaches
Microsanj is a leading supplier of thermal imaging systems based on the Thermoreflectance principal. Shrinking device dimensions and complex 3-dimensional architectures have greatly exacerbated the ability to thermally analyze today’s state-of-the-art microelectronic and optoelectronic devices, information critical for ensuring device performance and long term reliability. Microsanj has carefully engineered and configured their systems to be cost-effective solutions with the attributes and resolution necessary to meet the thermal imaging challenges of these advanced devices.