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  • Infrared and near infrared imaging has been used for many years as a means for measuring and characterizing the thermal performance of electronic and optoelectronic devices and microelectronic systems. In recent years Themoreflectance imaging has continued to evolve and has been demonstrated to provide a complementary approach for the thermal characterization of devices. Thermoreflectance imaging has proven to be especially useful in the characterization of devices with sub-micron features. This application note describes the thermoreflectance imaging process and provides some comparisons with infrared imaging.

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