NT100 Thermoreflectance Image Analyzer

NT110 Thermal Imaging System

Microsanj Nanotherm Thermal Imaging Systems are based on the thermoreflectance principal, a concept that takes advantage of the relative change in the sample’s surface reflectivity as a function of temperature. As the temperature of the sample changes, the refractive index, and therefore, the reflectivity also changes. The change in reflectivity is dependent on the Thermoreflectance Coefficient, a basic material property that is a function of the illumination wavelength, the sample material and material surface characteristics, and the ambient temperature.

With illumination wavelengths in the visible range, a lock-in technique to enhance signal to noise ratio, and advanced embedded algorithms for data analysis, the Microsanj thermal imaging systems surpass traditional thermal imaging techniques in spatial resolution and temporal resolution.

Shrinking geometries and more complex structures are making it more difficult to thermally analyze today’s advanced microelectronic and optoelectronic devices. At the same time, with higher power densities and faster switching speeds it is even more important to have a full understanding of the thermal behavior under both static and dynamic conditions to ensure performance and long-term reliability. The Microsanj NT110A is a general purpose thermal imaging system that meets the challenges imposed by these devices. The NT110A is designed to meet this challenge. The system is self-contained with a small footprint well-suited for bench-top operation and ease of inter-department portability. The NT110A supports static and time-dependent full-field thermal analysis with submicron spatial resolution and 10 microsecond temporal resolution. Relative temperatures can be determined with a resolution of 1 ⁰C.

The embedded SanjVIEW™ software with its advanced algorithms provides a versatile fully integrated platform with a user-friendly interface and a wide range of available formats to facilitate data analysis and presentation.

The first Microsanj thermal imaging systems based on thermoreflectance were introduced in 2009 and over the ensuing years have gained worldwide acceptance with demonstrated and proven value-added performance in research, development, and manufacturing. The NT110A General Purpose Imaging System is the most economical thermoreflectance-based system currently available. It, most certainly, represents a cost-effective way to realize the thermal imaging benefits of what thermoreflectance has to offer. The NT110A can be an excellent analytical tool that can be deployed in the development lab for thermal modeling and design, in manufacturing for process optimization, and in quality assurance for monitoring process variations and for failure analysis.

TECHNICAL SPECIFICATION

General Purpose Visible Thermal Image Analyzer

NT110B

System Description Visible Transient Thermoreflectance
Spatial Resolution1 (diffraction limited) 0.9 microns
Thermal Resolution1 1.0 °C Relative (2 minutes average)
Active Thermal Pixels (horiz. x vert.) CCD 1280 x 960 (1cmx0.8cmFieldofViewat1x)
CCD Interface GigE
Software SanjCONTROLLERTM and SanjVIEWTM 2.0 for control, analysis, & automation
Illumination LED light source 470nm, 530nm, 780nm, White
Optical System Microscope 5x and 20x Objectives
Biasing Two Programmable Power Supplies: 28v, 1A and +-10V, 5mA
Thermal Imaging Method Short pulse visible spectrum differential thermoreflectance
Temporal Resolution 10 μs Typical
1. Requires optical table mount

Additional Product Information:

Nanotherm NT100 Brochure
Product Reference Guide
Product Catalog

Application Notes:

AN-003: Understanding the Thermoreflectance Coefficient
AN-004: Comparing Thermal Imaging Approaches

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